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经营范围
发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5380166(A)
申请公布日期
1978.07.15
申请号
JP19760156770
申请日期
1976.12.25
申请人
FUJITSU LTD
发明人
KOTANI KOUICHIROU;OOKAWA TANJI
分类号
H01L21/027;G03F7/20;H01L21/302
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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