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发明名称
METHOD FOR TREATING RESIST FILMS TO FORM RELIEF PATTERNS
摘要
申请公布号
GB1517796(A)
申请公布日期
1978.07.12
申请号
GB19750037060
申请日期
1975.09.09
申请人
RCA CORP
发明人
分类号
G03F7/039;G03F7/022;G03F7/30;(IPC1-7):G03C5/00
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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