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发明名称
EXPOSURE DEVICE PERMITTING OBSERVATION OF CONTACT STATE BETWEEN MASK AND SPECIMEN WAFER
摘要
申请公布号
JPS5375868(A)
申请公布日期
1978.07.05
申请号
JP19760152371
申请日期
1976.12.17
申请人
NIPPON ELECTRIC CO
发明人
KOBAYASHI KAZUTO;GOSEKI HIROSHI
分类号
H01L21/027;H01L21/68
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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