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发明名称
KONTINUIERLICH ARBEITENDE GASPLASMA- AETZVORRICHTUNG
摘要
申请公布号
DE2757498(A1)
申请公布日期
1978.06.29
申请号
DE19772757498
申请日期
1977.12.22
申请人
TOKYO SHIBAURA ELECTRIC CO.,LTD.
发明人
YAMAMOTO,SHINICHI;SUMITOMO,YASUSUKE;HORIIKE,YASUHIRO;SHIBAGAKI,MASAHIRO
分类号
H01L21/302;B23K28/00;B65G49/07;H01L21/00;H01L21/3065;H01L21/677;(IPC1-7):B23K28/00;H01L21/306;H05K3/08
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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