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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5367357(A)
申请公布日期
1978.06.15
申请号
JP19760142593
申请日期
1976.11.27
申请人
NIPPON ELECTRIC CO
发明人
YAMAUCHI MASAMITSU
分类号
H01L21/288;H01L21/28;H01L21/31;H01L21/318
主分类号
H01L21/288
代理机构
代理人
主权项
地址
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