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发明名称
PRODUCTION OF SEMICONDUCTOR ELEMENT ELECTRODE
摘要
申请公布号
JPS5366165(A)
申请公布日期
1978.06.13
申请号
JP19760141239
申请日期
1976.11.26
申请人
HITACHI LTD
发明人
MIYAMOTO KEIJI;KATOU HIROSHI
分类号
H01L21/60;H01L21/28
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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