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发明名称
EVALUATION METHOD FOR RELIABILITY OF SEMICONDUCTOR UNIT
摘要
申请公布号
JPS5366175(A)
申请公布日期
1978.06.13
申请号
JP19760141238
申请日期
1976.11.26
申请人
HITACHI LTD
发明人
YAMAGUCHI MASATO;OHISA TOSHIHIKO
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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