| 摘要 |
PURPOSE:To efficiently form a resist pattern on a substrate such as an original plate having a large area by so solid printing the board as to include the pattern with positive resist agent with a safety light. CONSTITUTION:Positive resist agent is applied on a substrate 1 so solid pattern- printed with safety light without curing the agent as to cover all an accurate part B and rough part C of a pattern. After drying, a pattern B necessary for fine and high accuracy is written by using, for example, a photo plotter or an electronic beam exposure unit based on a register mark 2 obtained by printing. Thereafter, it is developed to obtain a resist pattern A covered with the agent on the parts B and C. Thus, a predetermined resist pattern A can be formed on the substrate 1 having a large area efficiently. |
