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经营范围
发明名称
PLASMA ETCHING METHOD
摘要
申请公布号
JPS5349398(A)
申请公布日期
1978.05.04
申请号
JP19760123504
申请日期
1976.10.15
申请人
FUJITSU LTD
发明人
YANAGIDA KENZOU;YAMAGISHI FUMIO;ISHIZUKA TOSHIHIRO
分类号
H01J37/30
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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