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发明名称
ELECTRONIC PARTS
摘要
申请公布号
JPS5348474(A)
申请公布日期
1978.05.01
申请号
JP19760122790
申请日期
1976.10.15
申请人
HITACHI LTD
发明人
SHIRASU TATSUMI;TAUCHI SEIJI;OSA YASUNOBU;SUGAWARA KATSUO
分类号
H01L29/78;H01L21/283;H01L21/316
主分类号
H01L29/78
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代理人
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