发明名称 KOTAISATSUZOSOCHI
摘要 PURPOSE:To obtain a deflecting device of solid-state image pickup element which can be produced in an easy way of production with excellent reliability and mechanical strength, by fixing the 1st bimorph oscillator to the end face of one side of a basement and a solid-state image pickup element and the 2nd bimorph oscillator to the end face of the other side of the basement and the solid-state image pickup element respectively to apply an electric field to these bimorph oscillators and then moving with a shift the basement and the solid- state image pickup device in parallel to each other. CONSTITUTION:An electric field is applied to bimorph oscilators 21 and 22 so that they are bent to the right side respectively, and as a result a solid-state image pickup element 11 moves together with the oscillators 21 and 22 to the right side and in parallel to a basement 30. In this case, the element 11 never tilts to the basement 30 compared with a state obtained before the electric filed is applied for deflection since the element 11 moves in parallel to the basement 30. In case a backward electic field is applied, the element 11 moves horizontally and to the left side. Thus the deflection is attained. A high level of image resolution is obtained for a solid-state image pickup device owing to its consecutive operation.
申请公布号 JPH0245397(B2) 申请公布日期 1990.10.09
申请号 JP19820011857 申请日期 1982.01.29
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 TANUMA CHIAKI;IZUMI HIROHIKO;YOKOYAMA KATSUNORI
分类号 H01L41/09;H04N5/335 主分类号 H01L41/09
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