发明名称 |
Direct measurement of the electron beam of a scanning electron microscope |
摘要 |
Apparatus for measuring the electron beam diameter of a scanning electron microscope includes: a transducer which supports a heated wire acting as a knife edge; an electron collector; and a display. The electron beam is scanned across the knife edge to obtain a change in current density which is received by the electron collector and shown as a trace on the display. This trace is a relative measurement of electron beam diameter. The electron beam is scanned a second time with the transducer moving the heated wire abruptly during the second scan to cause a shift in the current density trace on the display. The amount of shift between the traces of the initial and second scans is a reference distance against which the relative measurement of electron beam diameter may be measured.
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申请公布号 |
US4086491(A) |
申请公布日期 |
1978.04.25 |
申请号 |
US19770771715 |
申请日期 |
1977.02.04 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
VAUGHAN, WILLIAM H. |
分类号 |
G01Q20/04;G01Q30/04;G01T1/29;H01J37/244;H01J37/28;(IPC1-7):G01N27/00 |
主分类号 |
G01Q20/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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