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发明名称
METHOD OF PLASMAAETCHING ALUMINUM
摘要
申请公布号
JPS5337552(A)
申请公布日期
1978.04.06
申请号
JP19760113485
申请日期
1976.09.21
申请人
NICHIDEN VARIAN KK
发明人
UKAI KATSUZOU
分类号
C23F4/00;C23F1/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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