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发明名称
SEMICONDUCTOR PROCESS
摘要
申请公布号
US4082604(A)
申请公布日期
1978.04.04
申请号
US19760646317
申请日期
1976.01.05
申请人
MOTOROLA, INC.
发明人
YANEZ, RICHARD R.
分类号
C23C22/56;H01L21/316;H01L21/3213;H01L21/768;(IPC1-7):C23F1/02
主分类号
C23C22/56
代理机构
代理人
主权项
地址
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