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发明名称
ELECTRON LENS
摘要
申请公布号
JPS5336169(A)
申请公布日期
1978.04.04
申请号
JP19760109959
申请日期
1976.09.16
申请人
HITACHI LTD
发明人
RIYOUDORI MICHIO;HARA TOSHIJI;GOTOU TATSUO;KATSUTA TEIJI;SEKI KAZUYOSHI
分类号
H01J37/141;H01J37/14
主分类号
H01J37/141
代理机构
代理人
主权项
地址
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