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发明名称
HEATING METHOD
摘要
申请公布号
JPS5335375(A)
申请公布日期
1978.04.01
申请号
JP19760108778
申请日期
1976.09.13
申请人
HITACHI LTD
发明人
AOSHIMA TAKAAKI;YOSHINAKA AKIRA;SHIMIZU HIROBUMI
分类号
C30B25/10;C30B25/18;H01L21/20;H01L21/205
主分类号
C30B25/10
代理机构
代理人
主权项
地址
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