| 发明名称 |
SEMICONDUCTOR DEVICE |
| 摘要 |
PURPOSE:To improve adhesion at the interface, eliminate the introduction of distortion and improve the reproducibility as a mask by using a high resistance polycrystalline film as an insulation film of group III-V compound semiconductor. |
| 申请公布号 |
JPS5335383(A) |
申请公布日期 |
1978.04.01 |
| 申请号 |
JP19760110234 |
申请日期 |
1976.09.13 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
ASAHI KUNIHIKO;ITOU KUNIO;INOUE MORIO |
| 分类号 |
H01L29/80;H01L21/314;H01L21/338;H01L29/76;H01L29/812;H01L33/14;H01L33/30;H01L33/44;H01L47/02 |
主分类号 |
H01L29/80 |
| 代理机构 |
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代理人 |
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