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发明名称
摘要
申请公布号	JPS537785(B2)	申请公布日期	1978.03.22
申请号	JP19710074373	申请日期	1971.09.23
申请人		发明人
分类号	H01L21/24;H01L29/93;(IPC1-7):H01L21/24	主分类号	H01L21/24
代理机构		代理人
主权项
地址

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