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发明名称
GAS TREATING METHOD OF SEMICONDUCTOR WAFERS
摘要
申请公布号
JPS5329676(A)
申请公布日期
1978.03.20
申请号
JP19760104590
申请日期
1976.08.31
申请人
NIPPON ELECTRIC CO
发明人
YAMAGISHI SOUKICHI
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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