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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT UNIT
摘要
申请公布号
JPS5326689(A)
申请公布日期
1978.03.11
申请号
JP19760100596
申请日期
1976.08.25
申请人
HITACHI LTD
发明人
HOASHI MASAAKI
分类号
H01L27/00;H01L21/3205;H01L23/52;H01L27/04
主分类号
H01L27/00
代理机构
代理人
主权项
地址
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