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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
GB1503301(A)
申请公布日期
1978.03.08
申请号
GB19760043369
申请日期
1976.10.19
申请人
COULTER INFORMATION SYSTEMS INC
发明人
分类号
C23C14/40;C23C14/56;H01J37/34;(IPC1-7):C23C15/00
主分类号
C23C14/40
代理机构
代理人
主权项
地址
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