| 摘要 |
PURPOSE:To prepare a large amt. of whisker efficiently in the titled process executed in vapor phase by shifting a substrate in a whisker generating zone continuously after shifting the substrate to a zone where a gaseous compd. contg. a transition metal is introduced and thermally decomposed. CONSTITUTION:Substrates comprising semicylindrical bodies prepd. by dividing a cylinder having a specified inside diameter (dia.) and length are fed intermittently into a furnace core tube 2 having a specified inside dia. and length and set horizontally in a two- zone electric tubular furnace 1 provided with a heater 3 by means of an automatic feeding device. The temp. of the zone 1 and 2 are held at ca. 600 deg.C and ca. 1,500 deg.C, respectively, and one of the pipes provided to the feeding side of the substrate of the furnace core tube 2 is fixed so that the pipe comes to a top end of the zone 1. Through this pipe, vapor of Fe(C5H5)2 which has been fed previously from an external vaporizer set at ca. 200 deg.C is introduced into the furnace after allowing the vapor to be carried by gaseous H2 having a specified flow rate and fed to the surface of the substrate which has been set for pushing out for a specified time. Then, the atmosphere is exchanged to H2 alone and the temp. is held for a specified time, and the substrate is transferred to the zone 2 with a pusher 5. A specified amt. of gaseous H2 contg. each specified amt. of SiH4 and CH4 is introduced, and is discharged from a discharging port sealed with gaseous N2 after it is cooled. |
