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发明名称
摘要
申请公布号
JPS5324266(U)
申请公布日期
1978.03.01
申请号
JP19760104407U
申请日期
1976.08.06
申请人
发明人
分类号
H01L21/027;H01L21/308;H01L21/48;(IPC1-7):H01L21/308
主分类号
H01L21/027
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代理人
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地址
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