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发明名称
SCANNING ELECTRON MICROSCOPE AND ITS SIM ILAR UNIT
摘要
申请公布号
JPS5322358(A)
申请公布日期
1978.03.01
申请号
JP19760096866
申请日期
1976.08.13
申请人
NIPPON ELECTRON OPTICS LAB
发明人
IKUE TAKAO
分类号
H01J37/21;H01J37/26
主分类号
H01J37/21
代理机构
代理人
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地址
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