| 摘要 |
PURPOSE:To collect high purity nitrogen by a method wherein liquefied nitrogen supplied from a liquid tank is purified through a purifying tower, oxidized in a catalyst tank and an adsorption tower and then removed through its adsorbing action. CONSTITUTION:Liquefied nitrogen with a high purity or a less purity is filled in a liquefied nitrogen tank 1 through a tank rolley and then the nitrogen is supplied to a lower part of a purifying tower 3. A condensor 4 may heat exchange an ultra high purity nitrogen gas at the top part of the purifying tower 3 and a circulating liquid nitrogen to make a descending liquefied nitrogen and then the nitrogen is gasified. The circulating nitrogen is guided to a heat exchanger 5, heat exchanged with the circulating nitrogen gas (going) and fed into a circulating nitrogen pressure increasing machine 6. The circulating nitrogen gas of which pressure is increased by the pressure increasing machine 6 shows that carbon monoxide within the nitrogen gas becomes a carbon dioxide gas through a catalyst tank 7. The circulating nitrogen gas is cooled by an after-cooler 8, then carbon dioxide is adsorbed and removed through the adsorbing tower 9, guided to the heat exchanger 5 and heat exchanged with a low temperature circulating nitrogen (coming). The cooled circulating nitrogen is fed into the purifying tower 3 to become an ascending gas. Oxygen component is contained in the descending liquid through a purification and separation in the purifying tower 3, and the ascending gas becomes an ultra-pure nitrogen gas. The descending liquefied nitrogen liquefied by the condensor 4 is collected at the top part of the purifying tower 3 and stored in the ultra pure liquefied nitrogen tank 2. |
