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发明名称
FORMING METHOD OF POLYCRYSTALLINE SILICON FILM
摘要
申请公布号
JPS5315757(A)
申请公布日期
1978.02.14
申请号
JP19760089113
申请日期
1976.07.28
申请人
HITACHI LTD
发明人
YASUDA SADAO
分类号
H01L21/205;H01L21/28;H01L21/283
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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