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发明名称
FLUSSIGPHASEN-EPITAXIEVERFAHREN
摘要
申请公布号
AT341579(B)
申请公布日期
1978.02.10
申请号
AT19730006928
申请日期
1973.08.07
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
分类号
C30B19/00;C30B19/10;C30B19/12;H01L21/208;(IPC1-7):H01L21/20
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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