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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH04261047(A)
申请公布日期
1992.09.17
申请号
JP19910017952
申请日期
1991.02.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
KOGA TAKESHI
分类号
H01L21/28;H01L21/336;H01L21/768;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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