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发明名称
METHOD OF MEASURING ELECTRICAL PARAMETERS OF SEMICONDUCTOR MATERIALS
摘要
申请公布号
SU591974(A1)
申请公布日期
1978.02.05
申请号
SU19762358864
申请日期
1976.05.17
申请人
FIZIKO-TEKHNICHESKIJ I IM A.F.IOFFE
发明人
KOROLKOV VLADIMIR ILICH,SU;YAKOVENKO ALEKSANDR ALEKSANDROVICH,SU;DANILCHENKO VALERIJ GRIGOREVICH,SU;BERGMANN YAAK VALDEKOVICH,SU
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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