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发明名称
摘要
申请公布号
JPS532969(U)
申请公布日期
1978.01.12
申请号
JP19760084511U
申请日期
1976.06.26
申请人
发明人
分类号
H01L21/3205;(IPC1-7):H01L21/88
主分类号
H01L21/3205
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代理人
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