| 摘要 |
PURPOSE:To improve chipping and wear resistances and to obtain high strength by coating the surface of an Si3N4-contg. sintered body having prescribed bending strength and fracture toughness with diamond or the like. CONSTITUTION:Si3N4 as a base is blended with <=15wt.% sintering auxiliary such as Al2O3 AlN, MgO or Y2O3 and sintered under pressure by hot pressing or other method to obtain a sintered body having >=80kg/mm<2> bending strength and >=6MN/m<3/2> fracture toughness. This sintered body is set in a reaction chamber kept at 10<-6>-10<-3>Torr degree of vacuum and gaseous starting material such as a gaseous CO-H2 mixture is fed at 1-1,000 SCCM flow rate and activated by excitation. The surface of the sintered body is coated with a diamond film of about 10mum thickness by microwave plasma CVD or other method at 300-1,200 deg.C and a diamond coated member is produced. |
