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发明名称
PROCEDE POUR POLIR DES SURFACES PLANES DE PHOSPHURE DE GALLIUM
摘要
申请公布号
FR2354022(A5)
申请公布日期
1977.12.30
申请号
FR19720035068
申请日期
1972.09.27
申请人
IBM
发明人
JAGTAR S. BASI
分类号
B24B37/00;H01L21/306;H01L21/308;(IPC1-7):B28D5/06;H01L19/00
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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