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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS PRODUCTION
摘要
申请公布号
JPS52156580(A)
申请公布日期
1977.12.27
申请号
JP19760073180
申请日期
1976.06.23
申请人
HITACHI LTD
发明人
HORIE NOBORU
分类号
H01L21/8226;H01L21/761;H01L21/8249;H01L27/02;H01L27/06;H01L27/082;H01L27/092;H03K19/094
主分类号
H01L21/8226
代理机构
代理人
主权项
地址
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