| 摘要 |
FIELD: physics, measuring. ^ SUBSTANCE: invention concerns the electronic technics, in particular, to microelectronics, and can be used at manufacturing of IS crystals and discrete semiconductor devices. The essence of declared expedient of the control of mechanical voltages in structure film - substrate consists in formation between a film and a substrate of the intermediate stratum which is selectively etched through windows in a film of the round shape with formation in a backlash film - substrate of the interference figure reflecting quantity and a direction of a vector of mechanical voltages. ^ EFFECT: expansion of technical possibilities of method at expense of possibility of control of direction of vector of mechanical voltages. ^ 4 dwg |
