| 摘要 |
An illumination unit and an apparatus for inspecting a rear side of a wafer including the same are provided to improve inspection reliability by supplying the light of a spot light type from various angles to the rear side of a wafer. An illumination unit(100) includes a body(110) and a light source(120). The body has an arched shape. The body positions a part of a wafer in an inner part of the arched shape when inspecting the wafer. The body guides the position of the light source. A camera for photographing the rear side of the wafer is positioned in an upper part of the central point of the arched shape. The body has a multi stage structure which is vertically laminated. The light source is positioned in each terminal of the multi stage structure. A plurality of light sources are installed along the arch of the inner surface of the body. When inspecting the rear state of the wafer positioned in the inner part of the arched shape of the body, the light source irradiates the light to the rear side of the wafer.
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