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发明名称
PRODUCTION OF THIN SEMICONDUCTOR PLATES
摘要
申请公布号
JPS52143756(A)
申请公布日期
1977.11.30
申请号
JP19760060020
申请日期
1976.05.26
申请人
HITACHI LTD
发明人
MAEJIMA HIROSHI;NAGATOMO HIROTO;SUZUKI JIYUN
分类号
C30B15/34;H01L21/208
主分类号
C30B15/34
代理机构
代理人
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