发明名称 |
Scanning apparatus, for producing masks for micro circuits |
摘要 |
A scanning device for providing rapid accurate mechanical line scanning of a preferably flat surface includes a radiation source, a radiation sensitive medium and apparatus for providing relative movement between the radiation source and the medium. The apparatus includes a driving device and a slide structure which is designed to oscillate at substantially its self resonant frequency in order to increase accuracy of operation.
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申请公布号 |
US4060816(A) |
申请公布日期 |
1977.11.29 |
申请号 |
US19760656282 |
申请日期 |
1976.02.09 |
申请人 |
WESTERBERG, GERHARD |
发明人 |
WESTERBERG, GERHARD |
分类号 |
H01L21/30;G02B26/10;G03F7/20;H01L21/027;(IPC1-7):G03B27/00 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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