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发明名称
SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPS52141168(A)
申请公布日期
1977.11.25
申请号
JP19760057634
申请日期
1976.05.19
申请人
NICHIDENSHI TECHNICS KK
发明人
MATSUDA HIROSHI;SATOU TAKESHI
分类号
H01J37/22;G01B15/00;G01N23/225;H01J37/28
主分类号
H01J37/22
代理机构
代理人
主权项
地址
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