ULTRA HIGH VOLTAGE RESISTOR AND THE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE

摘要

An insulator having a constant thickness is formed between a well region of a semiconductor substrate and polysilicon for a resistor by a series of manufacturing processes. Since the insulator has a durable structure against an applied high voltage, a resistor for a semiconductor device which can withstand an ultra high voltage without an increases in the size of a semiconductor substrate, can be manufactured. Also, a semiconductor device including the resistor can be manufactured.