发明名称 Stable tin free catalysts for electroless metallization
摘要 Catalysts which include nanoparticles of palladium metal and cellulose derivatives are used in electroless metal plating. The palladium catalysts are free of tin.
申请公布号 US9382626(B2) 申请公布日期 2016.07.05
申请号 US201514794880 申请日期 2015.07.09
申请人 Rohm and Haas Electronic Materials LLC 发明人 Liu Feng;Rzeznik Maria Anna
分类号 B05D3/04;B05D3/10;B01J21/00;B01J23/00;B01J25/00;B01J29/00;B01J31/00;C23C18/18;B01J23/44;B01J31/06;B01J31/28;B01J35/00;C23C18/30;C23C18/20;B01J37/16;B01J37/02;C23C18/34;C23C18/40;C23C18/50;H05K3/42;C23C18/32;C23C18/38 主分类号 B05D3/04
代理机构 代理人 Piskorski John J.
主权项 1. A method comprising: a) providing a substrate; b) applying an aqueous catalyst solution to the substrate, the aqueous catalyst solution comprises one or more antioxidants, nanoparticles of palladium metal and one or more compounds chosen from polymers having a formula:wherein R1, R2, R3, R4, R5, R6 and R7 are the same or different and chosen from —H, —CH2COOX, —C(O)—CH3, —C(O)—(CH2)z—CH3 andwherein n is an integer of at least 2, z is an integer of at least 1 and X is —H or a counter cation, and a reaction product of a polymer having a formula:wherein R9, R10, R11, R12, R13, R14, and R15 are the same or different and are chosen from —H, —CH3, —CH2CH3, —CH2OH, —[CH2CHR8]x—OH, —CH2CH(OH)CH3, —(CH2CHR8O)y—H, with the proviso that at least one of R9, R10, R11, R12, R13, R14, and R15 is —CH2OH, —[CH2CHR8]x—OH, —CH2CH(OH)CH3 or —(CH2CHR8O)y—H, wherein R8 is —H or —CH3, x and y are an integer of at least 1 and n and z are as described above, and a quaternary compound having a formula:wherein m is an integer from 1 to 16, Y is halogen, Z− is a counter anion, R16, R17 and R18 are the same or different and are —H, —CH3 or —(CH2)p—CH3, and R19 is —H or —CH3 and p is an integer of 1 to 9, and one or more cross-linking agents, the aqueous catalyst solution is free of tin; and c) electrolessly depositing metal onto the substrate using an electroless metal plating bath.
地址 Marlborough MA US