| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS optical scanner that can drive a mirror at a higher speed at a larger deflection angle than conventional such scanners.SOLUTION: A MEMS optical scanner 1 is equipped with a frame 2, a plurality of arms 3 to 6, a plurality of torsion bars 13 to 16 and a mirror 10. One end side of each of the plurality of arms 3 to 6 is fixed to the frame 2. One end side of each of the plurality of torsion bars 13 to 16 is connected on one end to the other end side of the plurality of arms 3 to 6 and connected on the other end side to the mirror 10. The mirror 10 has a reflective face that reflects the light radiating it. On the face reverse to the reflective face of the mirror 10, a taper-shaped reinforcing rib whose tip is thinner than the connecting part of the mirror 10 is formed.SELECTED DRAWING: Figure 2 |
