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发明名称
ABNORMALITY DETECTOR
摘要
PURPOSE:To inspect a flaw formed on indicating plate by scanning a surface of sample with a laser light and surveying its diffraction light.
申请公布号
JPS52137388(A)
申请公布日期
1977.11.16
申请号
JP19760053272
申请日期
1976.05.12
申请人
HITACHI LTD
发明人
SHINDOU YASUHIKO
分类号
G01N21/88;G01N21/94
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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