发明名称 |
Infrared temperature control of Czochralski crystal growth |
摘要 |
A method and apparatus for controlling the diameter of single crystals grown by the Czochralski process in which an infrared sensor determines the temperatures of the melt adjacent to the crystal and a control circuit compares an average of these temperatures to a reference temperature to provide an error signal which controls the inductive heating of the melt.
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申请公布号 |
US4058429(A) |
申请公布日期 |
1977.11.15 |
申请号 |
US19750637550 |
申请日期 |
1975.12.04 |
申请人 |
WESTINGHOUSE ELECTRIC CORPORATION |
发明人 |
DUNCAN, CHARLES;HOPKINS, RICHARD H. |
分类号 |
C30B15/26;(IPC1-7):B01J17/18 |
主分类号 |
C30B15/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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