发明名称 |
Ion Scattering spectrometer with two analyzers preferably in tandem |
摘要 |
Improved apparatus and method for measuring ions scattered from a surface, to thereby determine the mass of atoms at the surface. The apparatus includes two analyzers, preferably an energy analyzer and mass analyzer positioned in tandem. The mass analyzer may be tuned to pass only ions having the same mass as ions in an incident ion beam, and to reject sputtered ions, some of which may have the requisite energy to pass through the energy analyzer under a given set of conditions.
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申请公布号 |
US4058724(A) |
申请公布日期 |
1977.11.15 |
申请号 |
US19750591104 |
申请日期 |
1975.06.27 |
申请人 |
MINNESOTA MINING AND MANUFACTURING COMPANY |
发明人 |
MCKINNEY, JAMES T.;GOFF, ROBERT F. |
分类号 |
G01N23/227;G01N23/203;G01Q30/02;H01J49/00;H01J49/44;(IPC1-7):H01J37/26 |
主分类号 |
G01N23/227 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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