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发明名称
PRODUCTION OF SEMICONDUCTOR UNIT
摘要
申请公布号
JPS52127751(A)
申请公布日期
1977.10.26
申请号
JP19760045300
申请日期
1976.04.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
EGUCHI YOUICHI;TSUCHIYA YOSHIMI
分类号
H01L29/73;H01L21/225;H01L21/331
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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