PREPARATION OF SEMICONDUCTOR DEVICE,申请号JP19760042135-传众专利搜索

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发明名称	PREPARATION OF SEMICONDUCTOR DEVICE
摘要	PURPOSE:To provide a plurality of patterns for photo-etching in one photomask to perform precisely the alignment of the patterns, whereby the manufacturing yield and reliability of a semiconductor device of minute dimensions are improved.
申请公布号	JPS52125278(A)	申请公布日期	1977.10.20
申请号	JP19760042135	申请日期	1976.04.14
申请人	NIPPON ELECTRIC CO	发明人	YOSHIKAWA KAZUHIKO
分类号	H01L29/73;H01L21/027;H01L21/302;H01L21/331;H01L29/08	主分类号	H01L29/73
代理机构		代理人
主权项
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