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发明名称
MANUFACTURE OF SEMIICONDUCTOR DEVICE
摘要
申请公布号
JPS52119863(A)
申请公布日期
1977.10.07
申请号
JP19760036001
申请日期
1976.04.02
申请人
HITACHI LTD
发明人
YAMANAKA KAZUSUKE;SAIKI ATSUSHI
分类号
H01L21/312;H01L21/31
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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