VERFAHREN UND ANORDNUNG ZUR FOTOGRAFISCHEN ODER FOTOLITHOGRAFISCHEN HERSTELLUNG VON TEILKREISEN

摘要

Arranged on a first optical axis (A-A) are a light source (1), an aperture stop (5) a field lens (6) and a further lens (7). Arranged on a second optical axis (B-B) offset parallel to the first are an object field lens (10), a transparent carrier (11) with a master division (12), a projection lens (13) and a division carrier (14) with a photosensitive layer (15). The illuminated field (8) of the light source (1) is projected with approximately four-fold magnification at the location of the field lens (6) with the aid of a concave mirror (3) and of the condenser (2). Together with the further lens (7) and the object field lens (10) the field lens (6) projects the opening of the condenser as a homogeneous light field into the master division. Together with the object field lens (10), the further lens (7) projects the intermediate image of the illuminated field into the exit pupil of the projection lens (13). The illuminating device is mounted capable of rotation about the second optical axis, and projects the illuminated field centrally into the entrance pupil in any position. A constant circular movement of the illuminating device is used to achieve a uniform illumination of the photosensitive layer (15). <IMAGE>