MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19760032563-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS52116166(A)	申请公布日期	1977.09.29
申请号	JP19760032563	申请日期	1976.03.26
申请人	HITACHI LTD	发明人	FUKUYAMA MASATAKA
分类号	H01L21/22;H01L21/322	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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