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发明名称
METHOD OF DIFFUSING SEMICONDUCTOR
摘要
申请公布号
JPS52115660(A)
申请公布日期
1977.09.28
申请号
JP19760032304
申请日期
1976.03.24
申请人
KOKUSAI ELECTRIC CO LTD
发明人
KUROKAWA HARUSHIGE
分类号
C30B31/02;H01L21/223;H01L21/225
主分类号
C30B31/02
代理机构
代理人
主权项
地址
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